TY  - JOUR
AU  - J Kolodzey
AU  - E Chowdhury
AU  - T Adam
AU  - G Qui
AU  - I Rau
AU  - J Olowolafe
AU  - John Suehle
AU  - Y Chen
C2  - IEEE Transactions on Electron Devices
DA  - 2000-03-23 00:03:00
LA  - en
M1  - 47
PB  - IEEE Transactions on Electron Devices
PY  - 2000
TI  - Electrical Conduction and Dielectric Breakdown in Aluminum Oxide Insulators on Silicon
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=30168
ER  -