TY  - JOUR
AU  - Morillo, J.
AU  - Su, Q.
AU  - Panchapakesan, B.
AU  - Wuttig, Matthias
AU  - Novotny, Donald
C2  - Review of Scientific Instruments
DA  - 1998-11-01 00:11:00
LA  - en
M1  - 69
PB  - Review of Scientific Instruments
PY  - 1998
TI  - Micromachined Silicon Torsional Resonator for Magnetic Anisotropy Measurement
ER  -