TY - JOUR AU - Morillo, J. AU - Su, Q. AU - Panchapakesan, B. AU - Wuttig, Matthias AU - Novotny, Donald C2 - Review of Scientific Instruments DA - 1998-11-01 00:11:00 LA - en M1 - 69 PB - Review of Scientific Instruments PY - 1998 TI - Micromachined Silicon Torsional Resonator for Magnetic Anisotropy Measurement ER -