TY - JOUR AU - Joseph Rice AU - David Rudman AU - C. Bang AU - M. Flik AU - M. Schmidt C2 - Journal of Microelectromechanical Systems DA - 1993-12-01 00:12:00 LA - en M1 - 2 PB - Journal of Microelectromechanical Systems PY - 1993 TI - Thermal Isolation of High-Temperature Superconducting Thin Films Using Silicon Wafer Bonding and Micromachining ER -