TY - GEN AU - C. Vezzetti AU - R. Varner AU - James Potzick C2 - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD DA - 1991-01-01 00:01:00 LA - en M1 - 260 PB - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD PY - 1991 TI - Standard Reference Materials: Bright-Chromium Linewidth Standard, SRM 476, for Calibration of Optical Microscope Linewidth Measuring Systems ER -