TY - CONF AU - John Moreland AU - Pavel Kabos AU - Albrecht Jander AU - M. Loehndorf AU - Robert McMichael AU - C Lee C2 - Proc., SPIE, Micromachined Devices and Components IV, vol. 4176, Santa Clara, CA, USA DA - 2000-09-01 00:09:00 LA - en PB - Proc., SPIE, Micromachined Devices and Components IV, vol. 4176, Santa Clara, CA, USA PY - 2000 TI - Micromechanical Detectors for Ferromagnetic Resonance Spectroscopy ER -