TY  - JOUR
AU  - Richard Allen
AU  - B Am ende
AU  - Michael Cresswell
AU  - Christine Murabito
AU  - T Headley
AU  - William Guthrie
AU  - Loren Linholm
AU  - Colleen Hood
AU  - E. Bogardus
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2003-05-01 00:05:00
LA  - en
M1  - 16
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2003
TI  - Test Structures for Referencing Electrical Linewidth Measurements to Silicon Lattice Parameters Using HRTEM
ER  -