TY  - JOUR
AU  - Amanda Goyettes
AU  - Yicheng Wang
AU  - Martin Misakian
AU  - James Olthoff
C2  - Journal of Vacuum Science and Technology A
DA  - 2000-11-01 00:11:00
LA  - en
PB  - Journal of Vacuum Science and Technology A
PY  - 2000
TI  - Ion fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C2F6 and c-C4F8
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16166
ER  -