TY  - CONF
AU  - Joaquin Martinez
AU  - John Dagata
AU  - Curt Richter
AU  - Richard Silver
C2  - 2004 Nanotechnology Conference and Trade Show, Boston, MA, USA
DA  - 2004-03-07 00:03:00
LA  - en
M1  - 3
PB  - 2004 Nanotechnology Conference and Trade Show, Boston, MA, USA
PY  - 2004
TI  - Metrology Development for the Nanoelectronics Industry at the National Institute of Standards and Technology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31539
ER  -