TY  - CONF
AU  - Deane Chandler-Horowitz
AU  - Nhan Nguyen
AU  - James Ehrstein
C2  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA
DA  - 2003-09-30 00:09:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA
PY  - 2003
TI  - Assessment of Utlra-thin SiO2 Film Thickness Meaurement Precision by Ellipsometry
ER  -