TY  - JOUR
AU  - Nadine Guillaume
AU  - Richard Allen
AU  - Michael Cresswell
AU  - Markku Lahti
AU  - Loren Linholm
AU  - Mona Zaghloul
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2004-05-01 00:05:00
LA  - en
M1  - 17
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2004
TI  - Non-contact Electrical CD Metrology Sensor for Chrome Photomasks Featuring a Low Temperature Co-fired Ceramic Technology
ER  -