TY  - CONF
AU  - Deane Chandler-Horowitz
AU  - Paul Amirtharaj
AU  - John Stoup
C2  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
DA  - 1998-03-01 00:03:00
LA  - en
PB  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
PY  - 1998
TI  - High-Resolution, High-Accuracy, Mid-IR (450 cm<sup>-1</sup> {less than or equal to} &#969; {less than or equal to} 4000 cm<sup>-1</sup>) Refractive Index Measurements in Silicon
ER  -