TY - CONF
AU - Chandler-Horowitz, Deane
AU - Amirtharaj, Paul
AU - Stoup, John
C2 - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
DA - 1998-03-01 00:03:00
LA - en
PB - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
PY - 1998
TI - High-Resolution, High-Accuracy, Mid-IR (450 cm-1 {less than or equal to} ω {less than or equal to} 4000 cm-1) Refractive Index Measurements in Silicon
ER -