TY  - CONF
AU  - Safak Sayan
AU  - Mark Croft
AU  - Nhan Nguyen
AU  - Tom Emge
AU  - James Ehrstein
AU  - Igor Levin
AU  - John Suehle
AU  - Robert Bartynski
AU  - Eric Garfunkel
C2  - 2005 International Conference on Characterization and Metrology for ULSI Technology, Dallas, TX, USA
DA  - 2005-09-28 00:09:00
LA  - en
PB  - 2005 International Conference on Characterization and Metrology for ULSI Technology, Dallas, TX, USA
PY  - 2005
TI  - The Relation between Crystalline Phase, Electronic Structure and Dielectric Properties in High-K Gate Stacks
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32018
ER  -