TY  - CONF
AU  - J. Lee
AU  - J Park
AU  - S. Krause
AU  - D. Venables
AU  - Peter Roitman
C2  - Proc., Electrochemical Society International Symposium on SOI Technology and Devices, San Francisco, CA, USA
DA  - 1994-12-31 00:12:00
LA  - en
PB  - Proc., Electrochemical Society International Symposium on SOI Technology and Devices, San Francisco, CA, USA
PY  - 1994
TI  - Effect of Implantation Conditions on Defect Microstructure in Annealed SIMOX
ER  -