TY - JOUR AU - Santos Mayo AU - John Fassett AU - H. Kingston AU - R. Walker C2 - Analytical Chemistry DA - 1990-02-01 00:02:00 LA - en M1 - 62 PB - Analytical Chemistry PY - 1990 TI - Measurement of Vanadium Impurity in Oxygen-Implanted Silicon by Isotope Dilution and Resonance Ionization Mass Spectrometry ER -