TY  - JOUR
AU  - Bogdan Lita
AU  - O Pluchery
AU  - R Opila
AU  - Y Chabal
AU  - G. Bunea
AU  - J Holman
AU  - E Bekos
C2  - Journal of Vacuum Science and Technology B
DA  - 2004-08-01 00:08:00
LA  - en
M1  - 22
PB  - Journal of Vacuum Science and Technology B
PY  - 2004
TI  - Wet chemical cleaning of plasma oxide grown on heated (001) InP surfaces
ER  -