TY  - JOUR
AU  - Yicheng Wang
AU  - Martin Misakian
AU  - Amanda Goyettes
AU  - James Olthoff
C2  - Journal of Applied Physics
DA  - 2000-11-01 00:11:00
LA  - en
PB  - Journal of Applied Physics
PY  - 2000
TI  - Ion Fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C<sub>2</sub>F<sub>6</sub> and c-C<sub>4</sub>F<sub>8</sub>
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=773
ER  -