TY  - JOUR
AU  - Brian Rennex
AU  - James Ehrstein
AU  - Robert Scace
C2  - Journal of the Electrochemical Society
DA  - 1996-01-01 00:01:00
LA  - en
M1  - 143
PB  - Journal of the Electrochemical Society
PY  - 1996
TI  - Methodology for the Certification of Reference Specimens for Determination of Oxygen Concentration in Semiconductor Silicon by Infrared Spectrophotometry
ER  -