TY - GEN AU - Donald Gajewski AU - Jonathan Guyer AU - Joseph Pellegrino C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 1999-02-19 00:02:00 LA - en PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 1999 TI - Spectroscopic Ellipsometry: In Situ Monitor and Control of III-V Semiconductors Grown by Molecular Beam Epitaxy ER -