TY  - CONF
AU  - Yicheng Wang
AU  - Amanda Goyettes
AU  - Martin Misakian
AU  - James Olthoff
C2  - Proc. XIII International Conference on Gas Discharges and Their Applications, Glasgow, 1, UK
DA  - 2000-09-01 00:09:00
LA  - en
PB  - Proc. XIII International Conference on Gas Discharges and Their Applications, Glasgow, 1, UK
PY  - 2000
TI  - Mass-resolved Studies of Positive Ions in High Density Plasmas Generated in CHF3, C2F6, and CH2FCF3 and Their Mixtures with Ar
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=11119
ER  -