TY  - CONF
AU  - Richard Allen
AU  - Rathindra Ghoshtagore
AU  - Michael Cresswell
AU  - Loren Linholm
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), Inspection and Process Control XII, Undefined
DA  - 1998-12-31 00:12:00
LA  - en
M1  - 3332
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), Inspection and Process Control XII, Undefined
PY  - 1998
TI  - Comparison of Properties of Electrical Test Structures Patterned in BESOI and DIMOX Films for CD Reference-Material Applications
ER  -