TY  - JOUR
AU  - Jihui Yang
AU  - Joseph Kopanski
AU  - A Postula
AU  - M Bialkowski
C2  - Microelectronics Reliability
DA  - 2004-12-20 00:12:00
LA  - en
M1  - 45
PB  - Microelectronics Reliability
PY  - 2004
TI  - Experimental investigation of interface states and photovoltaic effects on the scanning capacitance microscopy measurement for p-n junction dopant profiling
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31743
ER  -