TY  - CONF
AU  - Richard Allen
AU  - Amy Hunt
AU  - Christine Murabito
AU  - Brandon Park
AU  - William Guthrie
AU  - Michael Cresswell
C2  - ICMTS IEEE International Conference on Microelectronic Test Structures, Leuven, 1, BE
DA  - 2005-04-18 00:04:00
LA  - en
PB  - ICMTS IEEE International Conference on Microelectronic Test Structures, Leuven, 1, BE
PY  - 2005
TI  - Extraction of Critical Dimension Reference Feature CDs from New Test Structure Using HRTEM Imaging
ER  -