TY  - JOUR
AU  - Hong, Y.
AU  - Yeow, Tong
AU  - Chim, W.
AU  - Wong, K.
AU  - Kopanski, Joseph
C2  - IEEE Transactions on Electron Devices
DA  - 2004-09-01 00:09:00
LA  - en
M1  - 51
PB  - IEEE Transactions on Electron Devices
PY  - 2004
TI  - Influence of Interface Traps and Surface Mobility Degradation on Scanning Capacitance Microscopy Measurement
ER  -