TY - CONF AU - Amanda Goyettes AU - Yicheng Wang AU - James Olthoff C2 - Proc. of Characterization and Metrology for ULSI Technology 2000 Intl. Conf., Gaithersburg, MD DA - 2001-01-01 00:01:00 LA - en PB - Proc. of Characterization and Metrology for ULSI Technology 2000 Intl. Conf., Gaithersburg, MD PY - 2001 TI - Comparison of the Identities, Fluxes, and Energies of Ions Formed in High Density Fluorocarbon Discharges UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=2759 ER -