TY  - JOUR
AU  - Kristine Bertness
AU  - C. Wang
AU  - Marc Salit
AU  - Gregory Turk
AU  - Therese Butler
AU  - Albert Paul
AU  - Larry Robins
C2  - Journal of Vacuum Science and Technology B
DA  - 2006-03-01 00:03:00
LA  - en
M1  - 24
PB  - Journal of Vacuum Science and Technology B
PY  - 2006
TI  - High-accuracy determination of epitaxial AlGaAs composition with inductively coupled plasma optical emission spectroscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32020
ER  -