TY  - CONF
AU  - James Ehrstein
AU  - Curt Richter
AU  - Deane Chandler-Horowitz
AU  - Eric Vogel
AU  - Donnie Ricks
AU  - Chadwin Young
AU  - Steve Spencer
AU  - Shweta Shah
AU  - Dennis Maher
AU  - Brendan Foran
AU  - Alain Diebold
AU  - Pui-Yee Hung
C2  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA
DA  - 2003-09-30 00:09:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA
PY  - 2003
TI  - Thickness Evaluation for 2nm SiO2 Films, a Comparison of Ellipsometric, Capacitance-Voltage and HRTEM Measurements
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31352
ER  -