TY - CONF AU - James Moyne AU - Jonathan Parrott AU - Naveen Kalappa AU - Ya-Shian Li-Baboud C2 - AEC/APC Symposium XVIII, Westminster, CO, USA DA - 2006-09-30 00:09:00 LA - en PB - AEC/APC Symposium XVIII, Westminster, CO, USA PY - 2006 TI - Practical Aspects Impacting Time Synchronization Data Quality in Semiconductor Manufacturing UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32428 ER -