TY  - CONF
AU  - Richard Allen
AU  - Ronald Dixson
AU  - Michael Cresswell
AU  - William Gutherie
AU  - Byron Shulver
AU  - Andrew Bunting
AU  - J. Stevenson
AU  - Anthony Walton
C2  - Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD, USA
DA  - 2007-09-30 00:09:00
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD, USA
PY  - 2007
TI  - CD Reference Materials Fabricated on Monolithic 200 mm Wafers for Automated Metrology Tool Applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32654
ER  -