TY  - GEN
AU  - Stephen Knight
AU  - Joaquin Martinez
AU  - Michele Buckley
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2007-07-02 00:07:00
DO  - https://doi.org/10.6028/NIST.IR.7426
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2007
TI  - Semiconductor Microelectronics and Nanoelectronics Programs
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32721
ER  -