TY - JOUR AU - Michelle Chabot AU - John Moreland AU - Lan Gao AU - Sy-hwang Liou AU - C. Miller C2 - Journal of Microelectromechanical Systems DA - 2005-10-05 00:10:00 LA - en M1 - 14 PB - Journal of Microelectromechanical Systems PY - 2005 TI - Novel Fabrication of Micromechanical Oscillators With Nanoscale Sensitivity at Room Temperature UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31632 ER -