TY - JOUR AU - Janet Cassard AU - David Herman AU - Paul Vernier AU - Don DeVoe AU - Michael Gaitan C2 - IEEE Electron Device Letters DA - 2007-11-01 00:11:00 LA - en M1 - 28 PB - IEEE Electron Device Letters PY - 2007 TI - Young's Modulus Measurements in Standard IC CMOS Processes using MEMS Test Structures UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32659 ER -