TY  - CONF
AU  - J Schneir
AU  - T Mcwaid
AU  - Ronald Dixson
AU  - V Tsai
AU  - John Villarrubia
AU  - Edwin Williams
AU  - E Fu
C2  - Proceedings of SPIE, Santa Clara, CA, USA
DA  - 1995-05-01 00:05:00
LA  - en
M1  - 2439
PB  - Proceedings of SPIE, Santa Clara, CA, USA
PY  - 1995
TI  - Progress on Accurate Metrology of Pitch, Height, Roughness, and Width Artifacts Using an Atomic Force Microscope
ER  -