TY  - CONF
AU  - James Gilsinn
AU  - Hui Zhou
AU  - Bradley Damazo
AU  - Joseph Fu
AU  - Richard Silver
C2  - Proceedings of Nanotech 2004, Boston, MA, USA
DA  - 2004-03-11 00:03:00
LA  - en
PB  - Proceedings of Nanotech 2004, Boston, MA, USA
PY  - 2004
TI  - Nano-Lithography in Ultra-High Vacuum (UHV) for Real World Applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822480
ER  -