TY - CONF AU - XuanFang Zha AU - Ram Sriram AU - Satyandra Gupta C2 - Proceedings of the DETC '2005 ASME Design Engineering Technical Conference, Long Beach, CA, USA DA - 2005-07-01 00:07:00 LA - en PB - Proceedings of the DETC '2005 ASME Design Engineering Technical Conference, Long Beach, CA, USA PY - 2005 TI - Information and Knowledge Modeling for Computer Supported Micro Electro-Mechanical Systems Design and Development UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822297 ER -