TY  - CONF
AU  - W Tan
AU  - Robert Allen
AU  - Michael Cresswell
AU  - Christine Murabito
AU  - B Park
AU  - Ronald Dixson
AU  - William Guthrie
C2  - International Conference on Microelectronic Test Structures, Leuven, 1, BE
DA  - 2005-04-04 00:04:00
LA  - en
PB  - International Conference on Microelectronic Test Structures, Leuven, 1, BE
PY  - 2005
TI  - Comparison of SEM and HRTEM CD-Measurements Extracted From Monocrystalline Tes-Structures Having Feature Linewidths From 40 nm to 240 nm
ER  -