TY  - CONF
AU  - Michael Cresswell
AU  - William Penzes
AU  - Robert Allen
AU  - L Linholm
AU  - C Ellenwood
AU  - E Teague
C2  - Proceedings of SPIE, San Jose, CA, USA
DA  - 1994-05-01 00:05:00
LA  - en
M1  - 2196
PB  - Proceedings of SPIE, San Jose, CA, USA
PY  - 1994
TI  - Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards
ER  -