TY  - CONF
AU  - Richard Silver
AU  - James Potzick
AU  - Fredric Scire
AU  - Christopher Evans
AU  - Michael McGlauflin
AU  - Edward Kornegay
AU  - Robert Larrabee
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XI, Susan K. Jones, Editor, Santa Clara, CA, USA
DA  - 1997-07-01 00:07:00
LA  - en
M1  - 3050
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XI, Susan K. Jones, Editor, Santa Clara, CA, USA
PY  - 1997
TI  - A Method to Characterize Overlay Tool Misalignments and Distortions
ER  -