TY - JOUR AU - F Chien AU - W Hsieh AU - S Gwo AU - Andras Vladar AU - John Dagata C2 - Journal of Applied Physics DA - 2002-06-15 00:06:00 LA - en M1 - 91(12) PB - Journal of Applied Physics PY - 2002 TI - Silicon Nanostructures Fabricated by Scanning Probe Oxidation and Tetramethyl Ammonium Hydroxide Etching ER -