TY  - CONF
AU  - Egon Marx
AU  - I Malik
AU  - Y Strausser
AU  - T Bristow
AU  - N Poduje
AU  - J Stover
C2  - Proceedings of SPIE, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, John C. Stover, Editor, San Jose, CA, USA
DA  - 1998-03-01 00:03:00
LA  - en
M1  - 3275
PB  - Proceedings of SPIE, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, John C. Stover, Editor, San Jose, CA, USA
PY  - 1998
TI  - Round Robin Determination of Power Spectral Densities of Different Si Wafer Surfaces
ER  -