TY  - CONF
AU  - B Newell
AU  - Michael Postek
AU  - J VanDerZiel
C2  - Proceedings of SPIE, Microlithography and Metrology in Micromachining, Michael T. Postek, Editor, Austin, TX, USA
DA  - 1995-09-01 00:09:00
LA  - en
M1  - 2640
PB  - Proceedings of SPIE, Microlithography and Metrology in Micromachining, Michael T. Postek, Editor, Austin, TX, USA
PY  - 1995
TI  - Application of the Prototype NIST SRM 2090a SEM Magnification Standard in a Manufacturing Environment
ER  -