TY  - CONF
AU  - Ronald Dixson
AU  - Theodore Vorburger
AU  - P Sullivan
AU  - V Tsai
AU  - T Mcwaid
C2  - Proceedings of American Society for Precision Engineering, , USA
DA  - 1996-01-01 00:01:00
LA  - en
M1  - 14
PB  - Proceedings of American Society for Precision Engineering, , USA
PY  - 1996
TI  - Toward Accurate Measurements of Pitch, Height, and Width Artifacts with the NIST Calibrated AFM
ER  -