TY - CONF AU - Ronald Dixson AU - J Schneir AU - T Mcwaid AU - N. Sullivan AU - V Tsai AU - S Zaidi AU - S Brueck C2 - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography X, Susan K. Jones, Editor, Santa Clara, CA, USA DA - 1996-05-01 00:05:00 LA - en M1 - 2725 PB - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography X, Susan K. Jones, Editor, Santa Clara, CA, USA PY - 1996 TI - Toward Accurate Linewidth Metrology Using Atomic Force Microscopy and Tip Characterization ER -