TY  - CONF
AU  - Richard Silver
AU  - Carsten Jensen
AU  - V Tsai
AU  - Joseph Fu
AU  - John Villarrubia
AU  - E Teague
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor, Santa Clara, CA, USA
DA  - 1998-06-01 00:06:00
LA  - en
M1  - 3332
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor, Santa Clara, CA, USA
PY  - 1998
TI  - Developing a Method to Determine Linewidth Based on Counting the Atom-Spacings Across a Line
ER  -