TY - JOUR AU - M Scheinfein AU - John Unguris AU - Michael Kelley AU - Daniel Pierce AU - Robert Celotta C2 - Review of Scientific Instruments DA - 1990-01-01 00:01:00 LA - en M1 - 61 PB - Review of Scientific Instruments PY - 1990 TI - Scanning Electron Microscopy With Polarization Analysis (SEMPA) UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620360 ER -