TY - JOUR AU - R Scholten AU - Jabez McClelland AU - E Palm AU - A Gavrin AU - Robert Celotta C2 - Journal of Vacuum Science and Technology B DA - 1994-05-01 00:05:00 LA - en M1 - 12 PB - Journal of Vacuum Science and Technology B PY - 1994 TI - Nanostructure Fabrication via Direct Writing with Atoms Focused in Laser Fields ER -