TY  - CONF
AU  - Roy Geiss
AU  - David Read
C2  - SPIE Proceedings, Nano Science and Engineering 2007, San Diego, CA, USA
DA  - 2007-08-06 00:08:00
LA  - en
PB  - SPIE Proceedings, Nano Science and Engineering 2007, San Diego, CA, USA
PY  - 2007
TI  - Microstructure of 100 nm damascene copper overburden and lines studied by electron backscatter diffraction
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50619
ER  -