TY - CONF AU - Geiss, Roy AU - Read, David C2 - SPIE Proceedings, Nano Science and Engineering 2007, San Diego, CA, USA DA - 2007-08-06 00:08:00 LA - en PB - SPIE Proceedings, Nano Science and Engineering 2007, San Diego, CA, USA PY - 2007 TI - Microstructure of 100 nm damascene copper overburden and lines studied by electron backscatter diffraction UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50619 ER -