TY  - CONF
AU  - Robert Keller
AU  - Cynthia Volkert
AU  - Roy Geiss
AU  - Andrew Slifka
AU  - David Read
AU  - Nicholas Barbosa
AU  - Reiner Monig
C2  - Advanced Metallization Conf., Proc., Colorado Springs, CO, USA
DA  - 2005-09-01 00:09:00
LA  - en
M1  - 21
PB  - Advanced Metallization Conf., Proc., Colorado Springs, CO, USA
PY  - 2005
TI  - Electrical Methods for Mechanical Characterization of Interconnect Thin Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50210
ER  -