TY - CONF AU - B Bunday AU - M Bishop AU - D Mccormack AU - John Villarrubia AU - Andras Vladar AU - Theodore Vorburger AU - Ndubuisi Orji AU - J Allgair C2 - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, Richard M. Silver, Santa Clara, CA, USA DA - 2004-05-01 00:05:00 LA - en M1 - 5375 PB - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, Richard M. Silver, Santa Clara, CA, USA PY - 2004 TI - Determination of Optimal Parameters for CD-SEM Measurement of Line Edge Roughness UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822538 ER -