TY  - JOUR
AU  - Jay Marchiando
AU  - Joseph Kopanski
AU  - John Albers
C2  - Journal of Vacuum Science and Technology
DA  - 2000-03-01 00:03:00
LA  - en
M1  - 18
PB  - Journal of Vacuum Science and Technology
PY  - 2000
TI  - Limitations of the Calibration Curve Method for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements
ER  -