TY  - CONF
AU  - Richard Allen
AU  - Ravi Patel
AU  - Michael Cresswell
AU  - Christine Murabito
AU  - Brandon Park
AU  - Monica Edelstein
AU  - Loren Linholm
C2  - ICMTS IEEE International Conference on Microelectronic Test Structures, Awaji Island, 1, JA
DA  - 2004-03-01 00:03:00
LA  - en
PB  - ICMTS IEEE International Conference on Microelectronic Test Structures, Awaji Island, 1, JA
PY  - 2004
TI  - Recent Developments in Producing Test-structures for Use as Critical Dimension Reference Materials
ER  -